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Details of Grant 

EPSRC Reference: GR/R51544/01
Title: MPE: HARM Technologies for optical and rf competents
Principal Investigator: Syms, Professor R
Other Investigators:
Yeatman, Professor EM Holmes, Professor A
Researcher Co-Investigators:
Project Partners:
Department: Electrical and Electronic Engineering
Organisation: Imperial College London
Scheme: Standard Research (Pre-FEC)
Starts: 18 March 2002 Ends: 17 March 2005 Value (£): 636,196
EPSRC Research Topic Classifications:
Microsystems
EPSRC Industrial Sector Classifications:
Electronics
Related Grants:
Panel History:  
Summary on Grant Application Form
Microsystems Technology (MST) is a rapidly growing field, with major applications in many industries. The Optical and Semiconductor Devices Group of the Imperial College EEE Dept. have established a nationally leading MST activity, based on a fabrication facility that has been built up piecemeal. This proposal is a request for a single item of modern semiconductor process equipment, a Surface Technology Systems Single Chamber Multiplex ICP Etcher, which can form high aspect ratio microstructures (HARM) in single crystal silicon. Technical support for three years is also requested. The equipment will be used to support 10 existing research grants (8 x EPSRC, 1 x CEC, 1 x industrial), and will enable advances several fields, including mechanical, optical, electrical and micro-analytical devices. Significant applications are envisaged in optical and RF communications. Deep, movable microstructures formed in high quality material will be used as a basis for a wide variety of tuneable components. Example optical applications include adjustable (and subsequently fixable) optical micro-benches, tuneable Fabry-Perot filters and external cavity lasers. Example electrical applications include micro-power generation devices, micro-connectors, circuit breakers and protection devices, switches, low-loss tuneable capacitors and inductors, and high-order electromechanical filters for signal processing.
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Further Information:  
Organisation Website: http://www.imperial.ac.uk