| EPSRC Reference: |
GR/R62519/01 |
| Title: |
New Generation SS-MBE Growth System for Silicon System for Silicon Heterostructures. |
| Principal Investigator: |
Parker, Professor E |
| Other Investigators: |
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| Department: |
Physics |
| Organisation: |
University of Warwick |
| Scheme: |
JREI |
| Starts: |
04 April 2002 |
Ends: |
03 April 2005 |
Value (£): |
200,000
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| EPSRC Research Topic Classifications: |
| Electronic Devices & Subsys. |
Materials Synthesis & Growth |
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| EPSRC Industrial Sector Classifications: |
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Summary on Grant Application Form |
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The project involves developing procedures that allow well defined Si/SiGe/SiGeC heterostructures to be produced at a rate compatible with technology-driven research programmes. The proposed equipment (V200S) should enable the critical materials development work to be undertaken ahead of committing wafers for processing into devices and circuits for the UK SiGe MOS and HBT programmes and associated European projects (e.g. ECOPRO and RAPID). In the medium term it is intended to establish a SS-MBE Growth Centre for Si Heterostructures to enable scientific collaboration with other institutions working on physics and technology of this materials system ranging from quantum dots to 3G mobile communications systems.
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Key Findings |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Potential use in non-academic contexts |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Impacts |
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| Description |
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk |
| Summary |
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| Date Materialised |
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Sectors submitted by the Researcher |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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| Project URL: |
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| Further Information: |
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| Organisation Website: |
http://www.warwick.ac.uk |