EPSRC Reference: |
GR/S78919/01 |
Title: |
Novel Ion Sources for Application in Nanometer-Scale Surface and Interface Analysis |
Principal Investigator: |
Dowsett, Professor MG |
Other Investigators: |
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Researcher Co-Investigators: |
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Project Partners: |
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Department: |
Physics |
Organisation: |
University of Warwick |
Scheme: |
Standard Research (Pre-FEC) |
Starts: |
01 November 2004 |
Ends: |
31 December 2007 |
Value (£): |
321,026
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EPSRC Research Topic Classifications: |
Materials Characterisation |
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EPSRC Industrial Sector Classifications: |
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Related Grants: |
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Panel History: |
Panel Date | Panel Name | Outcome |
04 Nov 2003
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Elec & Functional Mat Panel (Tech) - Nov 2003
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Deferred
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Summary on Grant Application Form |
We propose to develop, test and optimise four different ion sources each of which are either novel in their own right, or novel in the proposed application (or both). These sources are for the production of cluster ions, mixed ion beams, and a micro-focus Cs beam. In conjunction with this, as part of the same project, suitable optics for matching each individual source to the floating low energy ion gun (FLIG) - developed by Dowsett et al. - will also be constructed. These ion sources are intended for applications in depth profiling, rather than top monolayer surface analysis, and are respectively; (i) a duoplasmatron source to produce a mixed beam of Xe+ and Cs+ ions, (ii) a cluster ion source producing negative ions such as Au n(n=2,3) - but also suitable for many other species, (iii) a solid state cluster source producing perrhenate ions such as Re04-, and (iv) a liquid metal source (LMIS) specifically engineered for a Cs+ microfocus beam and Cs n+ clusters. All of these source designs, with the exception of (iii), are based on an operational prototype which will be available at the start of the project, but which needs considerable further research and development to make it suitable for the applications area outlined in this proposal.The EVA 2000 SIMS instrument at Warwick is equipped with a FLIG and will be used as the test-bed for the sources. Using the technical resources in the Physics Department, this instrument can be adapted as required for each source and for different applications testing. This will provide an ability to both characterize the sources themselves, and test their effectiveness in various SIMS applications.
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Key Findings |
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Potential use in non-academic contexts |
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Impacts |
Description |
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Summary |
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Date Materialised |
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Sectors submitted by the Researcher |
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Project URL: |
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Further Information: |
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Organisation Website: |
http://www.warwick.ac.uk |