| EPSRC Reference: |
GR/T06322/01 |
| Title: |
Integration of Microelectromechanical Systems (MEMS) with Electronics in Silicon Carbide for Harsh Environments |
| Principal Investigator: |
Cheung, Professor R |
| Other Investigators: |
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| Researcher Co-Investigators: |
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| Project Partners: |
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| Department: |
Sch of Engineering |
| Organisation: |
University of Edinburgh |
| Scheme: |
Standard Research (Pre-FEC) |
| Starts: |
01 December 2004 |
Ends: |
31 May 2008 |
Value (£): |
236,244
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| EPSRC Research Topic Classifications: |
| Electronic Devices & Subsys. |
Microsystems |
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| EPSRC Industrial Sector Classifications: |
| Aerospace, Defence and Marine |
Electronics |
| Transport Systems and Vehicles |
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| Panel History: |
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Summary on Grant Application Form |
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The proposed research sets out to take advantage of the excellent electrical, mechanical and chemical properties of 3C-silicon carbide (SiC) with the aim of building dynamic and static sensors integrated with electronics on a single chip module to be used in harsh environments, e.g. aerospace, gas turbine, oil industry. By combining the unique strengths in SiC MEMS and electronics design, fabrication and testing, available at the Universities of Edinburgh and Newcastle, the critical step of integration for SiC MEMS and electronics into a single chip module will be overcome - essential for bringing SiC integrated microsystems to the future market place. The development of optimised technology for the integration step is central to the proposed research. The integrated SiC MEMS to be constructed includes lateral accelerometers, pressure sensors and metal-semiconductor field effect transistors. The proposed research programme represents the first of its kind in the world. The programme's success will not only open many opportunities for integrated sensors operating at > 600C to enter the commercial market, but also will provide excellent chances for the UK to gain leadership in this area.
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Key Findings |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Potential use in non-academic contexts |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Impacts |
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| Description |
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk |
| Summary |
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| Date Materialised |
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Sectors submitted by the Researcher |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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| Project URL: |
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| Further Information: |
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| Organisation Website: |
http://www.ed.ac.uk |