| EPSRC Reference: |
GR/S12838/01 |
| Title: |
PLATFORM: PLATFORM GRANT TO SUPPORT THE DEVELOPMENT OF MICRO/NANO TECHNOLOGY ACROSS A RANGE OF DISCIPLINES |
| Principal Investigator: |
Walton, Professor AJ |
| Other Investigators: |
|
| Researcher Co-Investigators: |
|
| Project Partners: |
|
| Department: |
Sch of Engineering |
| Organisation: |
University of Edinburgh |
| Scheme: |
Platform Grants (Pre-FEC) |
| Starts: |
01 December 2003 |
Ends: |
30 November 2006 |
Value (£): |
426,895
|
| EPSRC Research Topic Classifications: |
| Electronic Devices & Subsys. |
Microsystems |
|
| EPSRC Industrial Sector Classifications: |
| Aerospace, Defence and Marine |
Communications |
| Electronics |
Transport Systems and Vehicles |
|
| Related Grants: |
|
| Panel History: |
|
|
Summary on Grant Application Form |
|
The platform grant will be used to develop key technologies that will become essential for the Silicon Technology Research Group to implement in the next few years. These include wafer bonding (with buried layers) and the associated wafer thinning to provide projects with access to custom wafers which are very difficult to procure in small quantities. The other capability to be developed is the technology to post-process individual chips based upon the very successful post-processing of full silicon wafers. Post-processing full silicon wafers is an expensive option (20,000 per run) for speculative projects. Many potential collaborators who use resources such as Europractice, receive their devices as chips (typically 20-30). The existing fabrication facilities at Edinburgh are mainly focussed on handling wafers and, at present, the technology is not available to routinely handle individual chip post-processing. This capability is not generally available elsewhere and from the number of enquiries we receive there is a significant demand from the research community. The funding would also be used to provide the group with the resources to make better use of existing capabilities and, perhaps most importantly of all, pump-prime new and adventurous research projects. In addition it will also provide travel resources to enable staff to spend more time visiting other research establishments and developing further international collaborations
|
|
Key Findings |
|
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
|
|
Potential use in non-academic contexts |
|
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
|
|
Impacts |
|
| Description |
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk |
| Summary |
|
| Date Materialised |
|
|
|
|
Sectors submitted by the Researcher |
|
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
|
| Project URL: |
|
| Further Information: |
|
| Organisation Website: |
http://www.ed.ac.uk |